Project Title: Developing Multidomain MEMS Models for Educational Purposes - EduMEMS

Project No. 269295

Description

Micro-electro-mechanical systems (MEMS) represent a modern field in engineering with a significant impact on industrial applications. By combining together electrical, mechanical, thermal and optical elements, MEMS revolutionise the market of sensors and actuators. Clearly, each discipline mentioned above is a long-established and thoroughly researched field. However, there are still many MEMS phenomena left to be explored. The reason is twofold:

• MEMS are fabricated in the micrometer scale and microscale-related phenomena have not yet been fully researched
• MEMS allow merging many disciplines together and, therefore, mutual dependencies in the microscale between previously unrelated domains are created. Thus, it leads to appearing new research areas when two or more domains meet.

The complexity, multi-domain character and diversity of MEMS devices require the designers to specialise in several interdisciplinary domains in order to create a successful design. Currently, there are many research groups across Europe involved in one particular discipline. However, only few of them may have researchers specializing in all of them, which may limit or even impede MEMS research in Europe.

Therefore, the primary objective of the project is to combine efforts of European research teams for the purpose of forming an international interdisciplinary group working on a project of MEMS devices (EduMEMS), which incorporates multi-domain phenomena. Each partner involved in the project specialises in at least one research field related to MEMS. The researchers from each domain will be sent to other partners to work on the project and organise courses and lectures related to their specialization. Each partner will then gain knowledge about the domain, which previously he has not specialised in. As a result, each partner should expand their narrowly specialised research to other disciplines and become capable of performing multidomain MEMS research independently.

Objectives

The primary objective of the project is to combine efforts of European Research Teams for the purpose of forming an international interdisciplinary group working on a project of MEMS devices (EduMEMS), which incorporates multi-domain phenomena.
Additional objectives, which will be achieved in the project are connected with developing of mechanical, electrical, thermal and other models for MEMS components on the system and physical design levels, testing models in CAD tools and preparation of technological masks of specialized test chip.